Add initial PM support for SAM9X60. This include idle, WFI and ULP0.
Signed-off-by: Claudiu Beznea <claudiu.beznea@microchip.com>
Signed-off-by: Alexandre Belloni <alexandre.belloni@bootlin.com>
Signed-off-by: Ludovic Desroches <ludovic.desroches@microchip.com>